High-intensity excimer UV device
Rental-only excimer UV - Long-term rental available from 15 days to over 1 year - Monthly installment payments are possible - No repair costs for the equipment will be incurred.
**Advantages of Rental** - Difficult to introduce equipment - When existing equipment breaks down - When an excimer UV device is urgently needed - Want to reduce maintenance, upkeep, property tax, and management costs - New equipment introduction possible: Please consult separately **Features** - High brightness and high uniformity due to high-intensity RF discharge method - Direct irradiation on the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size **Electrode-less Irradiation Unit & N2 Slit Holder Structure** The lamp structure does not have electrodes on the irradiation surface side, resulting in no obstruction of light and minimal transmission or reflection losses, making it highly efficient. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. This efficiently generates ozone and allows for uniform control of oxygen concentration with a small amount. **Main Applications** - Cleaning and surface modification of glass, films, and wafers - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant hardening - Resist removal and ashing - Cleaning of chip, film, and substrate bonding surfaces
- Company：ブルーオーシャンテクノロジー
- Price：Other
